Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons

Authors

James M. Chenault
Charles S. Feigerle
Xianming Han, Butler UniversityFollow
Robert W. Shaw

Document Type

Article

Publication Date

2001

Publication Title

Diamond and Related Materials

First Page

1497

Last Page

1505

DOI

http://dx.doi.org/10.1016/S0925-9635(01)00381-8

Abstract

The chemistry of diamond film growth from chlorinated hydrocarbons has been investigated using a hot filament reactor coupled to an orifice sampling mass spectrometer. The relative concentrations of the species present near the growth surface have been determined as a function of filament temperature for dilute mixtures of CH₄, CH₃Cl, CH₂Cl₂ and CHCl₃ in H₂. Mass spectral analysis indicated that chlorinated hydrocarbons are sequentially dechlorinated in the presence of hydrogen at moderate reactor temperatures. A dark film was deposited on all surfaces of the reactor during studies of this dechlorination of CHCl₃. Raman analysis indicated that these deposits are small particle polycrystalline graphite. Pretreatment of a Si 〈111〉 substrate under conditions that create the graphite deposit is seen to produce a significant nucleation enhancement of diamond when followed by growth at a higher temperature. Chemical mechanisms for some of these processes are proposed.

Rights

Version of record can be found through Elsevier.

Recommended Citation

Chenault, James M.; Feigerle, Charles S.; Han, Xianming; and Shaw, Robert W., "Diamond Growth Reactor Chemistry and Film Nucleation Enhancement Using Chlorinated Hydrocarbons" Diamond and Related Materials / (2001): 1497-1505.
Available at https://digitalcommons.butler.edu/facsch_papers/754